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A Novel Degree of Freedom Separation Technique for 2-axis Tilt Sensors

N. Hey, A. Schumacher, W. Lang, and H. Sandmaier. Micro-system technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, VDE-Verl., (1996)

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Frank Heyen University of Stuttgart

Univ. -Prof. Dr. Arnd Heyer University of Stuttgart

Jun. -Prof. Michael Heymann University of Stuttgart

Jan-Philipp Negel

Thin-disk multipass amplifier for fs pulses delivering 400 W of average and 2.0 GW of peak power for linear polarization as well as 235 W and 1.2 GW for radial polarizationJ. Negel, A. Loescher, B. Dannecker, P. Oldorf, S. Reichel, R. Peters, M. Abdou Ahmed, and T. Graf. Applied Physics. B, Lasers and optics, 123 (5): 156 (2017)

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Other publications of authors with the same name

Microdosage of Liquids by a free jet comprising extraordinary operating rangeN. Hey, M. Freygang, H. Gruhler, H. Sandmaier, and R. Zengerle. Novel microfabrication options for BIOMEMS : technologies and commercialization strategies, Brookline, Knowledge Foundation, (1999)Thermal flow sensor for liquids and gases based on combinations of two principlesM. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, and W. Lang. Sensors and Actuators. A, Physical, 73 (1/2): 7-13 (1999)TopSpot - A New Method for the Fabrication of BioChipsH. Gruhler, N. Hey, M. Müller, S. Bekesi, M. Freygang, H. Sandmaier, and R. Zengerle. Micro-electro-mechanical systems (MEMS) - 1999 : microelectromechanical systems, microfluidics, MEMS packaging, thermal devices and measurements, medical applications of microsystems, 1, New York, NY, American Society of Mechanical Engineers, (1999)Micromirrors in Bulk Silicon Technology and ModellingH. Pavlicek, N. Hey, T. Strobelt, B. Schmidt, H. Sandmaier, and W. Lang. The 7th Micromechanics Europe Workshop - MME '96 : proceedings, Barcelona, Universitat, (1996)Multi level coupled simulations for MEMS designB. Folkmer, N. Hey, H. Sandmaier, and W. Lang. Proceedings of Eurosensors X, 5, page 1357-1360. Heverlee, Belgium, Catholic University Leuven, (1996)Microdosage of Liquids by a free jet comprising extraordinary operating rangeN. Hey, M. Freygang, H. Gruhler, H. Sandmaier, and R. Zengerle. Actuator 98 : conference proceedings, page 111-113. Bremen, AXON Technologie Consult GmbH, (1998)Microdosage of Liquids by a free jet comprising extraordinary operating rangeN. Hey, M. Freygang, H. Gruhler, H. Sandmaier, and R. Zengerle. Screentech 2000, Southborough, MA, International Business Communications, (2000)TopSpot - A New Method for the Fabrication of BioChipsH. Gruhler, N. Hey, M. Müller, S. Bekesi, M. Freygang, H. Sandmaier, and R. Zengerle. Screentech 2000, Southborough, MA, International Business Communications, (2000)Finite Elemente basierte Entwicklung einer zweiachsig neigungssensitiven Mikrostruktur in <110> SiliziumN. Hey, A. Schumacher, W. Lang, and H. Sandmaier. Fachtagung Simulation mit der Finite-Element-Methode in Feinwerk- und Mikrotechnik, page B-1. München, Institut für Technologie- und Wissenstransfer an der Fachhochschule München e.V., (1996)A new device for multifunctional dosage of liquids by a free jetN. Hey, M. Freygang, H. Gruhler, H. Sandmaier, and R. Zengerle. Proceedings / IEEE The Eleventh Annual International Workshop on Micro-Electro-Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, page 429-431. (1998)