%0 Journal Article %1 pauly2022modeling %A Pauly, Steffen %A Schulz, Andreas %A Walker, Matthias %A Gorath, Moritz %A Baumgärtner, Klaus %A Tovar, Günter E. M. %D 2022 %I Wiley-VCH %J Chemie - Ingenieur - Technik %K %N 3 %P 410-416 %R 10.1002/cite.202100144 %T Modeling and Experimental Study of a Remote Microwave Plasma Source for High-Rate Etching %V 94

@article{pauly2022modeling, added-at = {2023-08-31T16:24:37.000+0200}, affiliation = {Pauly, S (Corresponding Author), Univ Stuttgart, Inst Interfacial Proc Engn & Plasma Technol IGVP, Pfaffenwaldring 31, D-70569 Stuttgart, Germany. Pauly, Steffen; Schulz, Andreas; Walker, Matthias; Tovar, Gunter E. M., Univ Stuttgart, Inst Interfacial Proc Engn & Plasma Technol IGVP, Pfaffenwaldring 31, D-70569 Stuttgart, Germany. Gorath, Moritz; Baumgaertner, Klaus, MUEGGE GmbH, Hochstr 4-6, D-64385 Reichelsheim, Germany.}, author = {Pauly, Steffen and Schulz, Andreas and Walker, Matthias and Gorath, Moritz and Baumgärtner, Klaus and Tovar, Günter E. M.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26309fca8a46932a86d7734d434d4b266/puma-wartung}, doi = {10.1002/cite.202100144}, interhash = {c05644780a85f4648efab3e1f5f9cd29}, intrahash = {6309fca8a46932a86d7734d434d4b266}, issn = {{0009-286X} and {1522-2640}}, journal = {Chemie - Ingenieur - Technik}, keywords = {}, language = {eng}, number = 3, pages = {410-416}, publisher = {Wiley-VCH}, research-areas = {Engineering}, timestamp = {2023-08-31T14:24:37.000+0200}, title = {Modeling and Experimental Study of a Remote Microwave Plasma Source for High-Rate Etching}, unique-id = {WOS:000737261000001}, volume = 94, year = 2022 }