Femtosecond double pulse laser ablation of silicon
D. Förster, A. Lucke, R. Weber, und T. Graf. LAMP 2015 : the 7th International Congress on Laser Advanced Materials Processing : LPM 2015-the 16th International Symposium on Laser Precision Microfabrication : HPL 2015-the 7th International Symposium on High Power Processing, Kitaykyushu, Japan Laser Processing Society, (2015)
LAMP 2015 : the 7th International Congress on Laser Advanced Materials Processing : LPM 2015-the 16th International Symposium on Laser Precision Microfabrication : HPL 2015-the 7th International Symposium on High Power Processing
Jahr
2015
Verlag
Japan Laser Processing Society
venue
Kitakyushu, Japan
language
eng
eventdate
2015-05-26/2015-06-29
eventtitle
7th International Congress on Laser Advanced Materials Processing (LAMP); 16th International Symposium on Laser Precision Microfabrication (LPM 2015); 7th International Symposium on High Power Processing (HPL 2015)
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%0 Conference Paper
%1 forster2015femtosecond
%A Förster, Daniel J.
%A Lucke, André
%A Weber, Rudolf
%A Graf, Thomas
%B LAMP 2015 : the 7th International Congress on Laser Advanced Materials Processing : LPM 2015-the 16th International Symposium on Laser Precision Microfabrication : HPL 2015-the 7th International Symposium on High Power Processing
%C Kitaykyushu
%D 2015
%E Sugioka, Koji
%I Japan Laser Processing Society
%K
%T Femtosecond double pulse laser ablation of silicon
@inproceedings{forster2015femtosecond,
added-at = {2023-08-31T16:28:30.000+0200},
address = {Kitaykyushu},
author = {Förster, Daniel J. and Lucke, André and Weber, Rudolf and Graf, Thomas},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26cb6ec81fc71f88a1002a2d2fe7a1ace/puma-wartung},
booktitle = {LAMP 2015 : the 7th International Congress on Laser Advanced Materials Processing : LPM 2015-the 16th International Symposium on Laser Precision Microfabrication : HPL 2015-the 7th International Symposium on High Power Processing},
editor = {Sugioka, Koji},
eventdate = {2015-05-26/2015-06-29},
eventtitle = {7th International Congress on Laser Advanced Materials Processing (LAMP); 16th International Symposium on Laser Precision Microfabrication (LPM 2015); 7th International Symposium on High Power Processing (HPL 2015)},
interhash = {8cd4db46ef307ddd37a4f9818f50323b},
intrahash = {6cb6ec81fc71f88a1002a2d2fe7a1ace},
keywords = {},
language = {eng},
publisher = {Japan Laser Processing Society},
timestamp = {2023-08-31T14:28:30.000+0200},
title = {Femtosecond double pulse laser ablation of silicon},
venue = {Kitakyushu, Japan},
year = 2015
}