%0 Journal Article %1 rao2023quantitative %A Rao, Ratish Rao Nagaraj %A Bienert, Florian %A Moeller, Michael %A Bashir, Danish %A Hamri, Alina %A Celle, Frederic %A Gamet, Emilie %A Abdou Ahmed, Marwan %A Jourlin, Yves %D 2023 %I Optica %J Optics express %K %N 1 %P 371-380 %R 10.1364/OE.478688 %T Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography %V 31

@article{rao2023quantitative, added-at = {2023-11-14T15:36:47.000+0100}, affiliation = {Rao, RRN (Corresponding Author), Univ Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France. Rao, Ratish Rao Nagaraj; Celle, Frederic; Gamet, Emilie; Jourlin, Yves, Univ Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France. Bienert, Florian; Bashir, Danish; Ahmed, Marwan Abdou, Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, Germany. Moeller, Michael, AMO GmbH, Otto Blumenthal Str 25, D-52074 Aachen, Germany. Hamri, Alina, Manutech USD, Bailment Hautes Technol,20 Rue Prof Benoit Lauras, F-42000 St Etienne, France.}, author = {Rao, Ratish Rao Nagaraj and Bienert, Florian and Moeller, Michael and Bashir, Danish and Hamri, Alina and Celle, Frederic and Gamet, Emilie and Abdou Ahmed, Marwan and Jourlin, Yves}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/20877a687303b59b8e74b74cdff078544/unibiblio}, doi = {10.1364/OE.478688}, interhash = {8192a8bebd18b129a90f3a411a31cc95}, intrahash = {0877a687303b59b8e74b74cdff078544}, issn = {1094-4087}, journal = {Optics express}, keywords = {}, language = {eng}, number = 1, orcid-numbers = {Bienert, Florian/0000-0002-1322-4535 Abdou Ahmed, Marwan/0000-0002-1064-9298}, pages = {371-380}, publisher = {Optica}, research-areas = {Optics}, timestamp = {2023-11-14T14:36:47.000+0100}, title = {Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography}, unique-id = {WOS:000920797200030}, volume = 31, year = 2023 }