%0 Conference Paper %1 boellaard2001rfdevices %A Boellaard, E. %A Pham, Nga Phuong %A van Den Brekel, L. D. M. %A Burghartz, Joachim N. %B Book of abstracts : SAFE2001 Semiconductor Advances for Future Electronics, ProRISC2001 Program for Research on Integrated Systems and Circuits, SeSens2001 Semiconductor Sensor and Actuator Technology %C Utrecht %D 2001 %E Varwijk, Helga %I STW, Technology Foundation %K INES firstnamemissing pagesmissing %T RF-Devices Realised in MEMS by Using Electrodepositable Photoresist %@ 90-73461-29-4 and 90-73461-28-6 and 9789073461284

@inproceedings{boellaard2001rfdevices, added-at = {2019-04-04T12:43:41.000+0200}, address = {Utrecht}, author = {Boellaard, E. and Pham, Nga Phuong and van Den Brekel, L. D. M. and Burghartz, Joachim N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/272d16a583c45ed8285077a762a6e0cc7/kevin.konnerth}, booktitle = {Book of abstracts : SAFE2001 Semiconductor Advances for Future Electronics, ProRISC2001 Program for Research on Integrated Systems and Circuits, SeSens2001 Semiconductor Sensor and Actuator Technology}, editor = {Varwijk, Helga}, eventdate = {2001-11-28/2001-11-30}, eventtitle = {SAFE2001 Semiconductor Advances for Future Electronics, ProRISC2001 Program for Research on Integrated Systems and Circuits, SeSens2001 Semiconductor Sensor and Actuator Technology}, interhash = {7967e12a3aedca78b52c78493986cc5d}, intrahash = {72d16a583c45ed8285077a762a6e0cc7}, isbn = {{90-73461-29-4} and {90-73461-28-6} and {9789073461284}}, keywords = {INES firstnamemissing pagesmissing}, publisher = {STW, Technology Foundation}, timestamp = {2019-04-04T10:56:41.000+0200}, title = {RF-Devices Realised in MEMS by Using Electrodepositable Photoresist}, venue = {Veldhoven, The Netherlands}, year = 2001 }