%0 Conference Paper %1 ruehl2021focused %A Ruehl, Holger %A Haub, Michael %A Sahakalkan, Serhat %A Guenther, Thomas %A Zimmermann, André %B Proceedings of the 21st international conference of the european society for precision engineering and nanotechnology %D 2021 %K myown myownsend:unibiblio %P 137-140 %T Focused ion beam writing of submicron structures into coated mold inserts

@inproceedings{ruehl2021focused, added-at = {2022-06-02T09:39:11.000+0200}, author = {Ruehl, Holger and Haub, Michael and Sahakalkan, Serhat and Guenther, Thomas and Zimmermann, André}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d067dbafee338545d7c9af05b05aa236/thomasguenther}, booktitle = {Proceedings of the 21st international conference of the european society for precision engineering and nanotechnology}, eventdate = {June 7th to June 10th 2021}, eventtitle = {21st International Conference & Exhibition}, interhash = {acdc066c86b71ae944d83aea3d24d962}, intrahash = {d067dbafee338545d7c9af05b05aa236}, keywords = {myown myownsend:unibiblio}, language = {english}, month = {6}, organization = {european society for precision engineering and nanotechnology}, pages = {137-140}, timestamp = {2022-07-25T11:24:32.000+0200}, title = {Focused ion beam writing of submicron structures into coated mold inserts}, year = 2021 }