%0 Conference Paper
%1 Reichelt_2005
%A Reichelt, Stephan
%A Bieber, Alexander
%A Aatz, Bernd
%A Zappe, Hans
%B Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV
%D 2005
%E Osten, Wolfgang
%E Gorecki, Christophe
%E Novak, Erik L.
%I SPIE
%K s_reichelt
%R 10.1117/12.612584
%T Micro-optics metrology using advanced interferometry
@inproceedings{Reichelt_2005,
added-at = {2021-09-29T10:46:05.000+0200},
author = {Reichelt, Stephan and Bieber, Alexander and Aatz, Bernd and Zappe, Hans},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d0088d5b5ce929a9d60f0dd5f9734ffb/faulhaber},
booktitle = {Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection {IV}},
doi = {10.1117/12.612584},
editor = {Osten, Wolfgang and Gorecki, Christophe and Novak, Erik L.},
interhash = {bbf4aee53d043cc6778efca51340cf23},
intrahash = {d0088d5b5ce929a9d60f0dd5f9734ffb},
keywords = {s_reichelt},
month = {5},
publisher = {{SPIE}},
timestamp = {2021-09-30T08:26:24.000+0200},
title = {Micro-optics metrology using advanced interferometry},
year = 2005
}
