%0 Conference Paper %1 Reichelt_2005 %A Reichelt, Stephan %A Bieber, Alexander %A Aatz, Bernd %A Zappe, Hans %B Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV %D 2005 %E Osten, Wolfgang %E Gorecki, Christophe %E Novak, Erik L. %I SPIE %K s_reichelt %R 10.1117/12.612584 %T Micro-optics metrology using advanced interferometry

@inproceedings{Reichelt_2005, added-at = {2021-09-29T10:46:05.000+0200}, author = {Reichelt, Stephan and Bieber, Alexander and Aatz, Bernd and Zappe, Hans}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d0088d5b5ce929a9d60f0dd5f9734ffb/faulhaber}, booktitle = {Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection {IV}}, doi = {10.1117/12.612584}, editor = {Osten, Wolfgang and Gorecki, Christophe and Novak, Erik L.}, interhash = {bbf4aee53d043cc6778efca51340cf23}, intrahash = {d0088d5b5ce929a9d60f0dd5f9734ffb}, keywords = {s_reichelt}, month = {5}, publisher = {{SPIE}}, timestamp = {2021-09-30T08:26:24.000+0200}, title = {Micro-optics metrology using advanced interferometry}, year = 2005 }