%0 Journal Article %1 Choudhary_2023 %A Choudhary, Sumit %A Yogesh, Midathala %A Schwarz, Daniel %A Funk, Hannes S. %A Ghosh, Subrata %A Sharma, Satinder K. %A Schulze, Jörg %A Gonsalves, Kenneth E. %D 2023 %I American Vacuum Society %J Journal of Vacuum Science & Technology B %K iht journal %N 5 %R 10.1116/6.0002767 %T Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies %U https://doi.org/10.1116%2F6.0002767 %V 41

@article{Choudhary_2023, added-at = {2023-11-07T08:15:34.000+0100}, author = {Choudhary, Sumit and Yogesh, Midathala and Schwarz, Daniel and Funk, Hannes S. and Ghosh, Subrata and Sharma, Satinder K. and Schulze, Jörg and Gonsalves, Kenneth E.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c20a188477f40d379be000acb493c0f9/ihtpublikation}, description = {Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies | Journal of Vacuum Science & Technology B | AIP Publishing}, doi = {10.1116/6.0002767}, interhash = {cf48f94051e5d6d21eece539ce0341fb}, intrahash = {c20a188477f40d379be000acb493c0f9}, journal = {Journal of Vacuum Science & Technology B}, keywords = {iht journal}, month = aug, number = 5, publisher = {American Vacuum Society}, timestamp = {2023-11-07T08:22:57.000+0100}, title = {Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies}, url = {https://doi.org/10.1116%2F6.0002767}, volume = 41, year = 2023 }