%0 Journal Article %1 Augel2017 %A Augel, L. %A Berkmann, F. %A Latta, D. %A Fischer, I. A. %A Bechler, S. %A Elogail, Y. %A Kostecki, K. %A Potje-Kamloth, K. %A Schulze, J. %D 2017 %J Microfluidics and Nanofluidics %K iht j.schulze.iht journal %N 11 %P 169 %R 10.1007/s10404-017-2007-3 %T Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing %U https://doi.org/10.1007/s10404-017-2007-3 %V 21 %X Vertical optofluidic biosensors based on refractive index sensing promise highest sensitivities at smallest area footprint. Nevertheless, when it comes to large-scale fabrication and application of such sensors, cheap and robust platforms for sample preparation and supply are needed---not to mention the expected ease of use in application. We present an optofluidic sensor system using a cyclic olefin copolymer microfluidic chip as carrier and feeding supply for a complementary metal--oxide--semiconductor compatibly fabricated Ge PIN photodetector. Whereas typically only passive components of a sensor are located within the microfluidic channel, here the active device is directly exposed to the fluid, enabling top-illumination. The capability for detecting different refractive indices was verified by different fluids with subsequent recording of the optical responsivity. All components excel in their capability to be transferred to large-scale fabrication and further integration of microfluidic and sensing systems. The photodetector itself is intended to serve as a platform for further sophisticated collinear sensing approaches.

@article{Augel2017, abstract = {Vertical optofluidic biosensors based on refractive index sensing promise highest sensitivities at smallest area footprint. Nevertheless, when it comes to large-scale fabrication and application of such sensors, cheap and robust platforms for sample preparation and supply are needed---not to mention the expected ease of use in application. We present an optofluidic sensor system using a cyclic olefin copolymer microfluidic chip as carrier and feeding supply for a complementary metal--oxide--semiconductor compatibly fabricated Ge PIN photodetector. Whereas typically only passive components of a sensor are located within the microfluidic channel, here the active device is directly exposed to the fluid, enabling top-illumination. The capability for detecting different refractive indices was verified by different fluids with subsequent recording of the optical responsivity. All components excel in their capability to be transferred to large-scale fabrication and further integration of microfluidic and sensing systems. The photodetector itself is intended to serve as a platform for further sophisticated collinear sensing approaches.}, added-at = {2018-11-19T11:20:49.000+0100}, author = {Augel, L. and Berkmann, F. and Latta, D. and Fischer, I. A. and Bechler, S. and Elogail, Y. and Kostecki, K. and Potje-Kamloth, K. and Schulze, J.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/216ba99c65cfe27598bfd33447d3ca0c6/ihtpublikation}, day = 26, doi = {10.1007/s10404-017-2007-3}, interhash = {e989e1631c1c38bb44a70ce627b330ee}, intrahash = {16ba99c65cfe27598bfd33447d3ca0c6}, issn = {1613-4990}, journal = {Microfluidics and Nanofluidics}, keywords = {iht j.schulze.iht journal}, month = oct, number = 11, pages = 169, timestamp = {2018-11-19T10:20:49.000+0100}, title = {Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing}, url = {https://doi.org/10.1007/s10404-017-2007-3}, volume = 21, year = 2017 }