%0 Journal Article %1 kolatschek2019deterministic %A Kolatschek, S %A Hepp, S %A Sartison, M %A Jetter, M %A Michler, P %A Portalupi, S. L. %B Journal of Applied Physics %D 2019 %I American Institute of Physics %J Journal of Applied Physics %K ihfg %N 4 %P 045701-- %R 10.1063/1.5050344 %T Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography %U https://doi.org/10.1063/1.5050344 %V 125 %X In the present work, we investigate the coupling of deterministically pre-selected In(Ga)As/GaAs quantum dots (QDs) to low Q circular Bragg grating cavities by employing a combination of state-of-the-art low-temperature in-situ optical lithography and electron-beam lithography. The spatial overlap between the cavity mode and quantum emitter is ensured through the accurate determination of the QD position via precise interferometric position readout. Simultaneously, the high precision of the electron-beam lithography is exploited for the cavity fabrication. In order to optimize the spectral overlap, prior to cavity fabrication, finite-difference time-domain simulations are performed to estimate the spectral position of the cavity mode. A Purcell factor of 2 together with an increased count rate is reported for a deterministically positioned cavity where the emission line is detuned by 3.9 nm with respect to the cavity mode. This non-negligible Purcell enhancement for large detunings and, thus, the large ra...

@article{kolatschek2019deterministic, abstract = {In the present work, we investigate the coupling of deterministically pre-selected In(Ga)As/GaAs quantum dots (QDs) to low Q circular Bragg grating cavities by employing a combination of state-of-the-art low-temperature in-situ optical lithography and electron-beam lithography. The spatial overlap between the cavity mode and quantum emitter is ensured through the accurate determination of the QD position via precise interferometric position readout. Simultaneously, the high precision of the electron-beam lithography is exploited for the cavity fabrication. In order to optimize the spectral overlap, prior to cavity fabrication, finite-difference time-domain simulations are performed to estimate the spectral position of the cavity mode. A Purcell factor of 2 together with an increased count rate is reported for a deterministically positioned cavity where the emission line is detuned by 3.9 nm with respect to the cavity mode. This non-negligible Purcell enhancement for large detunings and, thus, the large ra...}, added-at = {2019-02-07T09:48:50.000+0100}, author = {Kolatschek, S and Hepp, S and Sartison, M and Jetter, M and Michler, P and Portalupi, S. L.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2f9b0faa9f8108c047930cdb10b9be543/thomas_herzog}, booktitle = {Journal of Applied Physics}, comment = {doi: 10.1063/1.5050344}, description = {Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography: Journal of Applied Physics: Vol 125, No 4}, doi = {10.1063/1.5050344}, interhash = {87e57af9e11af02171390b6e7a3c6744}, intrahash = {f9b0faa9f8108c047930cdb10b9be543}, issn = {00218979}, journal = {Journal of Applied Physics}, keywords = {ihfg}, month = jan, number = 4, pages = {045701--}, publisher = {American Institute of Physics}, timestamp = {2019-02-07T08:48:50.000+0100}, title = {Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography}, url = {https://doi.org/10.1063/1.5050344}, volume = 125, year = 2019 }