%0 Thesis %1 haub2023miniaturisierung %A Haub, Michael %C Stuttgart %D 2023 %K %R 10.18419/opus-13514 %T Miniaturisierung von Beschleunigungssensoren auf Basis des Tunneleffekts

@phdthesis{haub2023miniaturisierung, added-at = {2023-10-18T18:01:53.000+0200}, address = {Stuttgart}, author = {Haub, Michael}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/23bee25a32ffce945bd4e4ab3aec53975/unibiblio-3}, doi = {10.18419/opus-13514}, eventdate = {2022-10-05}, interhash = {508e92092195de12fdeff88013150d0d}, intrahash = {3bee25a32ffce945bd4e4ab3aec53975}, keywords = {}, language = {ger}, school = {Universität Stuttgart}, supervisor = {Zimmermann, André}, supervisorgnd = {114014409X}, timestamp = {2023-10-18T16:01:53.000+0200}, title = {Miniaturisierung von Beschleunigungssensoren auf Basis des Tunneleffekts}, type = {Dissertation}, year = 2023 }