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%0 Journal Article
%1 journals/complexity/SongLCLT18
%A Song, Fazhi
%A Liu, Yang
%A Cao, Jun
%A Li, Li
%A Tan, Jiubin
%D 2018
%J Complexity
%K dblp
%P 5406035:1-5406035:11
%T Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.
%U http://dblp.uni-trier.de/db/journals/complexity/complexity2018.html#SongLCLT18
%V 2018
@article{journals/complexity/SongLCLT18,
added-at = {2018-08-16T00:00:00.000+0200},
author = {Song, Fazhi and Liu, Yang and Cao, Jun and Li, Li and Tan, Jiubin},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/24e8301ca03e48cc355df04dce3fe0ba7/dblp},
ee = {https://doi.org/10.1155/2018/5406035},
interhash = {3d1c1d8d868dc8bdcf98261fd057f27a},
intrahash = {4e8301ca03e48cc355df04dce3fe0ba7},
journal = {Complexity},
keywords = {dblp},
pages = {5406035:1-5406035:11},
timestamp = {2019-09-27T11:46:15.000+0200},
title = {Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.},
url = {http://dblp.uni-trier.de/db/journals/complexity/complexity2018.html#SongLCLT18},
volume = 2018,
year = 2018
}