%0 Journal Article %1 journals/complexity/SongLCLT18 %A Song, Fazhi %A Liu, Yang %A Cao, Jun %A Li, Li %A Tan, Jiubin %D 2018 %J Complexity %K dblp %P 5406035:1-5406035:11 %T Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. %U http://dblp.uni-trier.de/db/journals/complexity/complexity2018.html#SongLCLT18 %V 2018

@article{journals/complexity/SongLCLT18, added-at = {2018-08-16T00:00:00.000+0200}, author = {Song, Fazhi and Liu, Yang and Cao, Jun and Li, Li and Tan, Jiubin}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/24e8301ca03e48cc355df04dce3fe0ba7/dblp}, ee = {https://doi.org/10.1155/2018/5406035}, interhash = {3d1c1d8d868dc8bdcf98261fd057f27a}, intrahash = {4e8301ca03e48cc355df04dce3fe0ba7}, journal = {Complexity}, keywords = {dblp}, pages = {5406035:1-5406035:11}, timestamp = {2019-09-27T11:46:15.000+0200}, title = {Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.}, url = {http://dblp.uni-trier.de/db/journals/complexity/complexity2018.html#SongLCLT18}, volume = 2018, year = 2018 }