%0 Journal Article %1 journals/dt/LiebmannT13 %A Liebmann, Lars %A Torres, J. Andres %D 2013 %J IEEE Design & Test %K dblp %N 3 %P 70-92 %T A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial]. %U http://dblp.uni-trier.de/db/journals/dt/dt30.html#LiebmannT13 %V 30

@article{journals/dt/LiebmannT13, added-at = {2016-03-09T00:00:00.000+0100}, author = {Liebmann, Lars and Torres, J. Andres}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b517b34587580d053c4ac7c918843a58/dblp}, ee = {http://dx.doi.org/10.1109/MDAT.2013.2255911}, interhash = {2b8ed721fcde3b99d85a051f59d8cec6}, intrahash = {b517b34587580d053c4ac7c918843a58}, journal = {IEEE Design & Test}, keywords = {dblp}, number = 3, pages = {70-92}, timestamp = {2016-03-10T11:20:13.000+0100}, title = {A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial].}, url = {http://dblp.uni-trier.de/db/journals/dt/dt30.html#LiebmannT13}, volume = 30, year = 2013 }