Optical metrology provides a unique approach to measuring surfaces, both technical and optical, over a wide measurement range from macro to nano. We present two new approaches to measuring aspheric lenses with increased flexibility. The first is based on a modified Twyman-Green interferometer where multiple sources for the illumination of the aspheric surface with different angles are adopted to achieve a local compensation of the gradient and consequently a reduction of interference fringes. The second is based on a chromatic Fizeau interferometer with a diffractive element as null-optic for the measurement of extreme ultraviolet aspheres.
%0 Journal Article
%1 Osten2010
%A Osten, W.
%A Doerband, B.
%A Garbusi, E.
%A Pruss, Ch.
%A Seifert, L.
%D 2010
%J Optoelectronics, Instrumentation and Data Processing
%K ide ito reviewed
%N 4
%P 329--339
%R 10.3103/S8756699010040059
%T Testing aspheric lenses: New approaches
%U https://doi.org/10.3103/S8756699010040059
%V 46
%X Optical metrology provides a unique approach to measuring surfaces, both technical and optical, over a wide measurement range from macro to nano. We present two new approaches to measuring aspheric lenses with increased flexibility. The first is based on a modified Twyman-Green interferometer where multiple sources for the illumination of the aspheric surface with different angles are adopted to achieve a local compensation of the gradient and consequently a reduction of interference fringes. The second is based on a chromatic Fizeau interferometer with a diffractive element as null-optic for the measurement of extreme ultraviolet aspheres.
@article{Osten2010,
abstract = {Optical metrology provides a unique approach to measuring surfaces, both technical and optical, over a wide measurement range from macro to nano. We present two new approaches to measuring aspheric lenses with increased flexibility. The first is based on a modified Twyman-Green interferometer where multiple sources for the illumination of the aspheric surface with different angles are adopted to achieve a local compensation of the gradient and consequently a reduction of interference fringes. The second is based on a chromatic Fizeau interferometer with a diffractive element as null-optic for the measurement of extreme ultraviolet aspheres.},
added-at = {2019-05-06T13:18:19.000+0200},
author = {Osten, W. and Doerband, B. and Garbusi, E. and Pruss, Ch. and Seifert, L.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29eed642de3a4aa9289d12d8717431320/vogelfrau},
day = 01,
doi = {10.3103/S8756699010040059},
interhash = {1979af5e1003925ebafb3072054c4f04},
intrahash = {9eed642de3a4aa9289d12d8717431320},
issn = {1934-7944},
journal = {Optoelectronics, Instrumentation and Data Processing},
keywords = {ide ito reviewed},
month = aug,
number = 4,
pages = {329--339},
timestamp = {2019-05-06T11:18:19.000+0200},
title = {Testing aspheric lenses: New approaches},
url = {https://doi.org/10.3103/S8756699010040059},
volume = 46,
year = 2010
}
