%0 Journal Article %1 Osten2010 %A Osten, W. %A Doerband, B. %A Garbusi, E. %A Pruss, Ch. %A Seifert, L. %D 2010 %J Optoelectronics, Instrumentation and Data Processing %K ide ito reviewed %N 4 %P 329--339 %R 10.3103/S8756699010040059 %T Testing aspheric lenses: New approaches %U https://doi.org/10.3103/S8756699010040059 %V 46 %X Optical metrology provides a unique approach to measuring surfaces, both technical and optical, over a wide measurement range from macro to nano. We present two new approaches to measuring aspheric lenses with increased flexibility. The first is based on a modified Twyman-Green interferometer where multiple sources for the illumination of the aspheric surface with different angles are adopted to achieve a local compensation of the gradient and consequently a reduction of interference fringes. The second is based on a chromatic Fizeau interferometer with a diffractive element as null-optic for the measurement of extreme ultraviolet aspheres.

@article{Osten2010, abstract = {Optical metrology provides a unique approach to measuring surfaces, both technical and optical, over a wide measurement range from macro to nano. We present two new approaches to measuring aspheric lenses with increased flexibility. The first is based on a modified Twyman-Green interferometer where multiple sources for the illumination of the aspheric surface with different angles are adopted to achieve a local compensation of the gradient and consequently a reduction of interference fringes. The second is based on a chromatic Fizeau interferometer with a diffractive element as null-optic for the measurement of extreme ultraviolet aspheres.}, added-at = {2019-05-06T13:18:19.000+0200}, author = {Osten, W. and Doerband, B. and Garbusi, E. and Pruss, Ch. and Seifert, L.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29eed642de3a4aa9289d12d8717431320/vogelfrau}, day = 01, doi = {10.3103/S8756699010040059}, interhash = {1979af5e1003925ebafb3072054c4f04}, intrahash = {9eed642de3a4aa9289d12d8717431320}, issn = {1934-7944}, journal = {Optoelectronics, Instrumentation and Data Processing}, keywords = {ide ito reviewed}, month = aug, number = 4, pages = {329--339}, timestamp = {2019-05-06T11:18:19.000+0200}, title = {Testing aspheric lenses: New approaches}, url = {https://doi.org/10.3103/S8756699010040059}, volume = 46, year = 2010 }