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Miniaturisierter optischer Drehwinkelsensor mit integrierter Interpolation

, , , , , , and . MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen : Innovative Produkte für zukunftsfähige Märkte, page 716-718. Berlin, VDE Verlag, (2021)

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