Author of the publication

copy delete add this publication to your clipboard
community post
history of this post
URL
DOI
BibTeX
EndNote
APA
Chicago
DIN 1505
Harvard
MSOffice XML

Automated multiscale measurement system for MEMS characterisation

W. Lyda, A. Burla, T. Haist, J. Zimmermann, and .... Optical Micro-and …, (2010)14 cites: https://scholar.google.com/scholar?cites=1524075053293164982&as_sdt=2005&sciodt=0,5&hl=en.

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

Dr. Dominik Zimmermann University of Stuttgart

Univ. -Prof. Dr. -Ing. André Zimmermann University of Stuttgart

Markus Zimmermann University of Stuttgart

J. K\"astner

J. Schwarz

Other publications of authors with the same name

A Comparative Performance Analysis of Two MILP Formulations for the Resource-Renting-Problem.M. Reinke, and J. Zimmermann. IEEM, page 979-983. IEEE, (2021)An Auction-based Mechanism for the Formation and Scheduling of Heterogeneous Human-machine Teams.F. Merz, C. Schwindt, S. Westphal, and J. Zimmermann. IEEM, page 863-868. IEEE, (2021)Verlässlichkeitsanalayse von Indikatorfunktionen in einem Automatisierten Multiskalen MeßsystemA. Burla, W. Lyda, W. Osten, J. Regin, E. Westkämper, J. Zimmermann, and O. Sawodny. tm - Technisches Messen, 77 (9): 493--499 (2010)Modeling for Simulation and Control of a X-Y High Precision Positioning TableJ. Zimmermann, and O. Sawodny. IEEE Conference on Automation Science and Engineering, page 1093--1097. Scottsdale, USA, (2007)Friction modelling of a linear high-precision actuatorJ. Zimmermann, O. Sawodny, T. Hausotte, and G. Jäger. IFAC World Congress, 38, page 133--138. Prague, Czech Republic, (2005)Automated Multi-Scale Measurement System for MEMS-CharacterizationW. Lyda, A. Burla, T. Haist, J. Zimmermann, W. Osten, and O. Sawodny. SPIE Conference on Optical Micro- and Nanometrology, (2010)Automated multiscale measurement system for micro optical elementsW. Lyda, A. Burla, T. Haist, J. Zimmermann, W. Osten, and .... Fringe 2009, (2009)2 cites: https://scholar.google.com/scholar?cites=14339227234193612658&as_sdt=2005&sciodt=0,5&hl=en.Die verteilte, objektorientierte Anwendung DaRT: Entwurf, Realisierung und Einsatzerfahrungen.J. Zimmermann, S. Euchner, M. Schissler, and M. Lange. EMISA, page 251-261. Teubner, Stuttgart, Leipzig, (1999)Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection TasksJ. Zimmermann, S. Oliver, L. Wolfram, and O. Wolfgang. IFAC Symposium on Mechatronic Systems, 43, page 545--551. Cambridge, MA, USA, IFAC Proceeedings Volumes, (September 2010)Modelling and Control of a X-Y-Fine Positioning TableJ. Zimmermann, and O. Sawodny. Ilmenauer Wissenschafliches Kolloquium (IWK), (2007)