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Automated Multi-Scale Measurement System for MEMS-Characterization

, , , , , and . SPIE Conference on Optical Micro- and Nanometrology, (2010)
DOI: 10.1117/12.853819

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Dr. -Ing. Tobias Haist University of Stuttgart

Improved far field holograms using spatial light modulators and camera-in-the-loop optimization, , , and . Digital Optical Technologies 2025, volume 13573 of Proc. SPIE, page 1357304. International Society for Optics and Photonics, SPIE, (August 2025)
 

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