Author of the publication

Detection of overlay error in double patterning gratings using phase-structured illumination

, , , , and . Optics express, 23 (19): 24246-24256 (2015)
DOI: 10.1364/OE.23.024246

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Remote Laboratories in the Cloud - A Digital Holographic Microscope., , and . CLOSER, page 374-381. SciTePress, (2013)Automatische Ableitung und Verarbeitung von Linienbildern., , and . it - Informationstechnik, 32 (6): 376-386 (1990)Guest Editorial Digital Holography for Industrial Applications., , and . IEEE Trans. Industrial Informatics, 12 (4): 1560-1563 (2016)Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks, , , and . IFAC Symposium on Mechatronic Systems, 43, page 545--551. Cambridge, MA, USA, IFAC Proceeedings Volumes, (September 2010)Multifokales konfokales Verfahren und konfokale Anordnung für wenig kooperative Objekte, and . (Nov 24, 2003)Mobile shearography system for the inspection of aircraft and automotive components, and . Optical Engineering - OPT ENG, (May 2003)Wave-front reconstruction from a sequence of interferograms recorded at different planes, , and . Opt. Lett., 30 (8): 833--835 (April 2005)Verfahren und Sensor zur hochgenauen optischen Abtastung, and . (Dec 9, 2004)Verfahren und Anordnung zur simultanten, multifokalen, optischen Anordnung, and . (Nov 24, 2003)Scherografie – die Umsetzung des Prinzips in ein mobiles Prüfsystem (Shearography – the Implementation of the Principle into a Mobile Inspection System), , and . (2009)