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Thin-film imaging: Past, present, prognosis., , , , and . IBM Journal of Research and Development, 41 (1&2): 105-118 (1997)Wafer-level 3D integration technology., , , , , , , , , and . IBM Journal of Research and Development, 52 (6): 583-597 (2008)Three-dimensional integrated circuits., , , , , , , , , and 1 other author(s). IBM Journal of Research and Development, 50 (4-5): 491-506 (2006)