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Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property.

H. Tang, J. Gao, X. Chen, K. Yu, S. To, Y. He, X. Chen, Z. Zeng, S. He, C. Chen, and Y. Li. IEEE Trans. Industrial Electronics, 65 (5): 3995-4005 (2018)

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Yunjie He University of Stuttgart

Chuxuan He University of Stuttgart

Andrea Hein

Ramin Hedeshy University of Stuttgart

apl. Prof. Dr. rer. nat. habil. Ulrich Hertrampf University of Stuttgart

Other publications of authors with the same name

Hybrid Position/Force Fully Closed-Loop Control of a Flip-Chip Soft-Landing Bonding System.J. Li, H. Tang, Z. Zhu, S. He, J. Gao, Y. He, and X. Chen. IEEE Trans. Ind. Electron., 69 (9): 9235-9245 (2022)Triangular Model Registration Algorithm Through Differential Topological Singularity Points by Helmholtz-Hodge Decomposition.D. Wu, J. Gao, Z. Xiao, L. Zhang, X. Chen, H. Tang, Y. Chen, and Y. He. IEEE Access, (2019)High Dynamic Control of a Flexure Fast Tool Servo Using On-line Sequential Extreme Learning Machine.Z. Wu, H. Tang, X. Chen, J. Gao, Y. He, Y. Xu, X. Chen, S. To, Y. Li, and C. Cui. AIM, page 604-609. IEEE, (2018)A regularized on-line sequential extreme learning machine with forgetting property for fast dynamic hysteresis modeling.Z. Wu, H. Tang, S. He, J. Gao, X. Chen, C. Cui, Y. He, K. Zhang, H. Li, and Y. Li. IROS, page 383-388. IEEE, (2017)Novel Dynamic Microactuation Method for Tracking-Error Reduction of Permanent Magnet Linear Synchronous Motors.J. Zhang, J. Gao, L. Zhang, Y. Luo, X. Chen, X. Chen, and Y. He. IEEE Trans. Ind. Electron., 69 (9): 9165-9175 (2022)A Rapid Vibration Reduction Method for Macro-Micro Composite Precision Positioning Stage.L. Zhang, J. Gao, X. Chen, H. Tang, Y. Chen, Y. He, and Z. Yang. IEEE Trans. Industrial Electronics, 64 (1): 401-411 (2017)A Stable Autoregressive Moving Average Hysteresis Model in Flexure Fast Tool Servo Control.J. Li, H. Tang, Z. Wu, H. Li, G. Zhang, X. Chen, J. Gao, Y. Xu, and Y. He. IEEE Trans. Automation Science and Engineering, 16 (3): 1484-1493 (2019)A direct-drive SCARA robot for wafer&ceramic-substrate handling based on visual servoing.Y. He, C. Zhang, W. Ye, Z. He, X. Chen, J. Gao, K. Zhang, Z. Yang, X. Chen, Y. Chen and 1 other author(s). CIS/RAM, page 428-433. IEEE, (2017)A large-stroke flexure fast tool servo with new displacement amplifier.H. Liang, H. Tang, L. Huang, J. Gao, X. Chen, S. To, Y. Li, and Y. He. AIM, page 52-57. IEEE, (2017)Review and Comparison of High-Dynamic Range Three-Dimensional Shape Measurement Techniques.H. Lin, J. Gao, G. Zhang, X. Chen, Y. He, and Y. Liu. J. Sensors, (2017)

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Disambiguation of "He, Yunbo"

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Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property.

Please choose a person to relate this publication to

Yunjie He University of Stuttgart

Chuxuan He University of Stuttgart

Andrea Hein

Ramin Hedeshy University of Stuttgart

apl. Prof. Dr. rer. nat. habil. Ulrich Hertrampf University of Stuttgart

Other publications of authors with the same name

Disambiguation

PUMA

Disambiguation of "He, Yunbo"

copydeleteadd this publication to your clipboardcommunity posthistory of this postURLDOIBibTeXEndNoteAPAChicagoDIN 1505HarvardMSOffice XML Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property.

Please choose a person to relate this publication to

Yunjie He University of Stuttgart

Chuxuan He University of Stuttgart

Andrea Hein

Ramin Hedeshy University of Stuttgart

apl. Prof. Dr. rer. nat. habil. Ulrich Hertrampf University of Stuttgart

Other publications of authors with the same name

Disambiguation

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history of this post
URL
DOI
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Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property.