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A modular integration concept for micropneumatic systems

, , , , , and . Sensor 99 : proceedings, 1, page 433-438. Wunstorf, AMA Service, (1999)

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Electrostatic microvalves in silicon with 2-way function for industrial applications, , , , and . Transducers '01 Eurosensors XV : digest of technical papers, 2, page 900-903. Berlin, Springer, (2001)3-way microvalve for pneumatic applications fabricated by silicon micromachining, , , , , and . Micro-electro-mechanical systems (MEMS) - 1998 : presented at the 1998 ASME International Mechanical Engineering Congress and Exposition, 66, page 159-164. New York, NY, ASME, (1998)A modular integration concept for micropneumatic systems, , , , , and . Sensor 99 : proceedings, 1, page 433-438. Wunstorf, AMA Service, (1999)Stereotactically navigated percutaneous microwave ablation (MWA) compared to conventional MWA: a matched pair analysis., , , , , , , and . Int. J. Comput. Assist. Radiol. Surg., 13 (12): 1991-1997 (2018)A modular integrated pressure control unit for gases, , , , , and . Technical digest / IEEE International MEMS '99 Conference, twelfth IEEE International Conference on Micro-Electro-Mechanical Systems, page 77-81. Piscataway, NJ, IEEE, (1999)