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Ultra-thin chip fabrication for next-generation silicon processes

J. Burghartz, C. Harendt, T. Hoang, A. Kiss, and M. Zimmermann. 2009 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, page 131-137. Piscataway, New Jersey, IEEE, (2009)
DOI: 10.1109/BIPOL.2009.5314128

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Univ. -Prof. Dr. -Ing. André Zimmermann University of Stuttgart

75 Jahre Institut für Mikrointegration (IFM) Universität StuttgartA. Zimmermann, and I. Burk. Stuttgart, Universität Stuttgart, Institut für Mikrointegration, (2019)

Dr. Dominik Zimmermann University of Stuttgart

Markus Zimmermann University of Stuttgart

Frank Zimmermann University of Stuttgart

Dr. phil. Yvonne Zimmermann University of Stuttgart

Other publications of authors with the same name

Ultra-Thin Chips on Foil for Flexible Electronics.H. Rempp, J. Burghartz, C. Harendt, N. Pricopi, M. Pritschow, C. Reuter, H. Richter, I. Schindler, and M. Zimmermann. ISSCC, page 334-335. IEEE, (2008)Cantilever-Based Biosensors in CMOS Technology.K. Kirstein, Y. Li, M. Zimmermann, C. Vancura, T. Volden, W. Song, J. Lichtenberg, and A. Hierlemann. DATE, page 1340-1341. IEEE Computer Society, (2005)Delay Games with WMSO+U Winning Conditions.M. Zimmermann. CoRR, (2014)Metal-Porous Silicon Contacts and Electrical Resistivity of Porous SiliconS. Ferwana, E. Angelopoulos, T. Zehender, M. Zimmermann, C. Harendt, and J. Burghartz. Proceedings : SAFE 2009, 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors and ProRISC 2009, 20th Annual Workshop on Circuits, Systems and Signal Processing : November 26 - 27, 2009, Veldhoven, the Netherlands, page 71-74. Utrecht, Techn. Foundation, (2009)Distributed synthesis for parameterized temporal logics.S. Jacobs, L. Tentrup, and M. Zimmermann. Inf. Comput., 262 (Part): 311-328 (2018)Delay Games with WMSO+U Winning Conditions.M. Zimmermann. RAIRO - Theor. Inf. and Applic., 50 (2): 145-165 (2016)Parametric Linear Dynamic Logic.P. Faymonville, and M. Zimmermann. GandALF, volume 161 of EPTCS, page 60-73. (2014)Finite-state Strategies in Delay Games.M. Zimmermann. GandALF, volume 256 of EPTCS, page 151-165. (2017)Robust, Expressive, and Quantitative Linear Temporal Logics: Pick any Two for Free.D. Neider, A. Weinert, and M. Zimmermann. CoRR, (2018)Distributed Synthesis for Parameterized Temporal Logics.S. Jacobs, L. Tentrup, and M. Zimmermann. CoRR, (2017)