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Application of porous silicon as a sacrificial layer

, , , , , and . This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93), 43, 1/3, page 239-242. Lausanne, Elsevier, (1994)
DOI: 10.1016/0924-4247(93)00655-N

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