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An electrodynamic injection pump - a novel actuator for microsystem technology

, , and . Micro-system technologies 90, Berlin, Springer, (1990)

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Compensation Corner Undercutting of (100) Silicon in KOH, , , , and . Sensors and Materials, 3 (3): 127-144 (1992)An electrodynamic injection pump - a novel actuator for microsystem technology, , and . Micro-system technologies 90, Berlin, Springer, (1990)Mikroaktoren und Sensoren nach dem elektrohydrodynamischen (EHD)-Prinzip, , , and . Sensor '91, Wunstorf, ACS Organisations, (1991)A micromachined electrohydrodynamic injection pump, , , and . Sensors and Actuators. A, Physical, 29 (2): 159-168 (1991)Electrohydrodynamic pumping and flow measurement, , , and . Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, page 271-276. New York, NY, IEEE, (1991)The electrohydrodynamic micro flow meter, , , and . Transducers '91 : digest of technical papers, page 935-938. New York, NY, IEEE, (1991)A monolithically integrated sensor system using sensor-specific CMOS cells, , , , , , , , and . Proceedings of Eurosensors VIII, volume 3 of Sensors and actuators. A, Physical, page 137-142. (1995)