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Diffusion of ion implanted hydrogen in amorphous Si-(B)-CN ceramics, , , , , and . 8th Seminar Diffusion and Thermodynamics of Materials, page 131--134. Masaryk University, (2002)of Proceedings: Proceedings of the 8th Seminar Diffusion and Thermodynamics of Materials, , , , , and . (2002)Comparison of 30Si diffusion in amorphous Si--C--N and Si--B--C--N precursor-derived ceramics, , , , , , and . Journal of non-crystalline solids, 298 (2-3): 232--240 (2002)Self-diffusion studies of 15 N in amorphous Si 3 BC 4.3 N 2 ceramics with ion implantation and secondary ion mass spectrometry, , , , , , and . Journal of Applied Physics, 88 (4): 1827--1830 (2000)Tracer self-diffusion studies in amorphous Si-(B)-CN ceramics using ion implantation and SIMS, , , , , , and . Defect and Diffusion Forum, 194, page 941--946. Trans Tech Publications, (2001)STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER (PACS 61-68, 78)-Self-diffusion studies of 15N in amorphous Si3BC4. 3N2 ceramics with ion implantation and secondary, , , , , , and . Journal of Applied Physics, 88 (4): 1827--1830 (2000)Future on-chip interconnect metallization and electromigration., , , , , , , , , and 14 other author(s). IRPS, page 4. IEEE, (2018)