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Benchmarking of Mask Fracturing Heuristics.

, , , , and . IEEE Trans. on CAD of Integrated Circuits and Systems, 36 (1): 170-183 (2017)

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Design-aware mask inspection., , , and . ICCAD, page 93-99. IEEE, (2010)Design-Aware Mask Inspection., , , and . IEEE Trans. on CAD of Integrated Circuits and Systems, 31 (5): 690-702 (2012)EUV-CDA: Pattern shift aware critical density analysis for EUV mask layouts., , , and . ASP-DAC, page 155-160. IEEE, (2014)Benchmarking of mask fracturing heuristics., , , , , and . ICCAD, page 246-253. IEEE, (2014)Power Variability in Contemporary DRAMs., , and . Embedded Systems Letters, 4 (2): 37-40 (2012)Benchmarking of Mask Fracturing Heuristics., , , , and . IEEE Trans. on CAD of Integrated Circuits and Systems, 36 (1): 170-183 (2017)Effective model-based mask fracturing for mask cost reduction., and . DAC, page 73:1-73:6. ACM, (2015)