Misc,

Replication Data for: Scalable production of solid-immersion lenses for quantum emitters in silicon carbide

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Dataset, (2021)Related to: F. Sardi, T. Kornher, M. Widmann, et al.. Scalable production of solid-immersion lenses for quantum emitters in silicon carbide. Appl. Phys. Lett. 117, 022105 (2020). doi: 10.1063/5.0011366.
DOI: 10.18419/darus-2083

Abstract

Data to replicate the experimental data plots in the paper: Fig. 1d, e: AFM scans of SIL before the etching and after the etching, possibility to see how the mask changed in the etching process; Fig. 2a, b, c: Confoscal scan of the all SIL, g2 measurements of one defect inside the sils and relative ODMR measurements related to Vsi in SiC in the SIL; Fig. 3a, b: statistics of centers inside the sils according to the enhancement, maximum enhancement reached for one center inside the SIL compared to the one outside

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