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%0 Journal Article
%1 stefanov2014structure
%A Stefanov, Stefan
%A Serra, Carmen
%A Benedetti, Alessandro
%A Conde, Jorge Carlos
%A Werner, Jens
%A Oehme, Michael
%A Schulze, Jörg
%A Wirths, Stephan
%A Buca, Dan
%A Chiussi, Stefano
%D 2014
%I Elsevier BV
%J Microelectronic Engineering
%K
%P 18-21
%R 10.1016/j.mee.2014.03.017
%T Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy
%V 125
@article{stefanov2014structure,
added-at = {2023-08-31T14:54:16.000+0200},
author = {Stefanov, Stefan and Serra, Carmen and Benedetti, Alessandro and Conde, Jorge Carlos and Werner, Jens and Oehme, Michael and Schulze, Jörg and Wirths, Stephan and Buca, Dan and Chiussi, Stefano},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2bb7e3cdefb269e07ecd83c2847450725/puma-wartung},
doi = {10.1016/j.mee.2014.03.017},
interhash = {e8bd232379961a1560dc187d651e3791},
intrahash = {bb7e3cdefb269e07ecd83c2847450725},
issn = {0167-9317},
journal = {Microelectronic Engineering},
keywords = {},
language = {eng},
pages = {18-21},
publisher = {Elsevier BV},
timestamp = {2023-08-31T12:54:16.000+0200},
title = {Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy},
volume = 125,
year = 2014
}