%0 Conference Paper %1 liao2022wafer %A Liao, Yiwen %A Latty, Raphaël %A Genßler, Paul R. %A Amrouch, Hussam %A Yang, Bin %B 2022 IEEE International Test Conference (ITC) %C Piscataway %D 2022 %I IEEE %K %P 1-9 %R 10.1109/ITC50671.2022.00006 %T Wafer Map Defect Classification Based on the Fusion of Pattern and Pixel Information %@ 978-1-6654-6270-9 and 978-1-6654-6271-6

@inproceedings{liao2022wafer, added-at = {2023-09-19T16:08:04.000+0200}, address = {Piscataway}, affiliation = {Liao, YW (Corresponding Author), Univ Stuttgart, Inst Signal Proc & Syst Theory, Stuttgart, Germany. Liao, Yiwen; Yang, Bin, Univ Stuttgart, Inst Signal Proc & Syst Theory, Stuttgart, Germany. Genssler, Paul R.; Amrouch, Hussam, Univ Stuttgart, Inst Comp Architecture & Comp Engn, Stuttgart, Germany. Latty, Raphael, Advantest Europe GmbH, Appl Res & Venture Team, Boblingen, Germany.}, author = {Liao, Yiwen and Latty, Raphaël and Genßler, Paul R. and Amrouch, Hussam and Yang, Bin}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e07f3d0042d9a2f0dd4f3db56c2a543b/unibiblio}, booktitle = {2022 IEEE International Test Conference (ITC)}, doi = {10.1109/ITC50671.2022.00006}, eventdate = {2022-09-23/2022-09-30}, eventtitle = {2022 IEEE International Test Conference (ITC)}, interhash = {dee4717db73c057259f1ed60d654d33e}, intrahash = {e07f3d0042d9a2f0dd4f3db56c2a543b}, isbn = {{978-1-6654-6270-9} and {978-1-6654-6271-6}}, keywords = {}, language = {eng}, pages = {1-9}, publisher = {IEEE}, research-areas = {Computer Science; Engineering}, timestamp = {2023-09-19T14:08:04.000+0200}, title = {Wafer Map Defect Classification Based on the Fusion of Pattern and Pixel Information}, unique-id = {WOS:000918580100001}, venue = {Anaheim, USA}, year = 2022 }