%0 Journal Article %1 siegle2024diffractive %A Siegle, Leander %A Xie, Dajie %A Richards, Corey A. %A Braun, Paul V. %A Gießen, Harald %D 2024 %I Optica %K %N 20 %P 35678-35688 %R 10.1364/OE.538142 %T Diffractive microoptics in porous silicon oxide by grayscale lithography %V 32

@article{siegle2024diffractive, added-at = {2025-03-18T14:54:01.000+0100}, affiliation = {Siegle, L (Corresponding Author), Univ Stuttgart, Phys Inst 4, Pfaffenwaldring 57, D-70569 Stuttgart, Germany. Siegle, L (Corresponding Author), Univ Stuttgart, Res Ctr SCoPE, Pfaffenwaldring 57, D-70569 Stuttgart, Germany. Xie, Dajie; Richards, Corey A.; Braun, Paulv, Univ Illinois, Dept Mat Sci \& Engn, Urbana, IL 61801 USA.}, author = {Siegle, Leander and Xie, Dajie and Richards, Corey A. and Braun, Paul V. and Gießen, Harald}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/209d6da8cd0f4ddf2abf4168bc072cca6/unibiblio}, doi = {10.1364/OE.538142}, interhash = {c60b452544e905b789db290f0bb5ec05}, intrahash = {09d6da8cd0f4ddf2abf4168bc072cca6}, issn = {1094-4087}, keywords = {}, language = {eng}, number = 20, pages = {35678-35688}, publisher = {Optica}, research-areas = {Optics}, timestamp = {2025-03-18T13:54:01.000+0100}, title = {Diffractive microoptics in porous silicon oxide by grayscale lithography}, unique-id = {WOS:001326965500006}, volume = 32, year = 2024 }