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%0 Journal Article
%1 journals/mr/WelBBHW07
%A van der Wel, P. J.
%A de Beer, J. R.
%A van Boxtel, R. J. M.
%A Hsieh, Y. Y.
%A Wang, Y. C.
%D 2007
%J Microelectronics Reliability
%K dblp
%N 8
%P 1188-1193
%T Effect of oval defects in GaAs on the reliability of SiNx metal-insulator-metal capacitors.
%U http://dblp.uni-trier.de/db/journals/mr/mr47.html#WelBBHW07
%V 47
@article{journals/mr/WelBBHW07,
added-at = {2010-09-16T00:00:00.000+0200},
author = {van der Wel, P. J. and de Beer, J. R. and van Boxtel, R. J. M. and Hsieh, Y. Y. and Wang, Y. C.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2cffb0f68fdc6010100024d6a4abf8a58/dblp},
ee = {http://dx.doi.org/10.1016/j.microrel.2007.01.089},
interhash = {a2774b0dbcc06e3b7890563a8a7d0259},
intrahash = {cffb0f68fdc6010100024d6a4abf8a58},
journal = {Microelectronics Reliability},
keywords = {dblp},
number = 8,
pages = {1188-1193},
timestamp = {2016-02-02T02:01:55.000+0100},
title = {Effect of oval defects in GaAs on the reliability of SiNx metal-insulator-metal capacitors.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#WelBBHW07},
volume = 47,
year = 2007
}