%0 Journal Article %1 journals/mr/TanZRLPHTM18 %A Tan, Pik Kee %A Zhao, Yuzhe %A Rivai, Francis %A Liu, Binghai %A Pan, Yanlin %A He, Ran %A Tan, Hao %A Mai, Zhihong %D 2018 %J Microelectronics Reliability %K dblp %P 309-314 %T Cross-sectional nanoprobing sample preparation on sub-micron device with fast laser grooving technique. %U http://dblp.uni-trier.de/db/journals/mr/mr88.html#TanZRLPHTM18 %V 88-90

@article{journals/mr/TanZRLPHTM18, added-at = {2019-01-07T00:00:00.000+0100}, author = {Tan, Pik Kee and Zhao, Yuzhe and Rivai, Francis and Liu, Binghai and Pan, Yanlin and He, Ran and Tan, Hao and Mai, Zhihong}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2aeccfc60dd190c452baefdc9f02b03dc/dblp}, ee = {https://doi.org/10.1016/j.microrel.2018.07.054}, interhash = {7ba8e827fb8cb0c2f40e40c4e97f3744}, intrahash = {aeccfc60dd190c452baefdc9f02b03dc}, journal = {Microelectronics Reliability}, keywords = {dblp}, pages = {309-314}, timestamp = {2019-09-27T10:58:38.000+0200}, title = {Cross-sectional nanoprobing sample preparation on sub-micron device with fast laser grooving technique.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr88.html#TanZRLPHTM18}, volume = {88-90}, year = 2018 }