Zusammenfassung
Holes and grooves created in parts made by laser additive manufacturing techniques generally have a widthexceeding 100 μm and aspect ratios well below 50, i.e. the depth to width ratio. The technique presented in thiswork involves a repeated cycle of adding single material layers using a continuous-wave (cw) laser, followed bylocalized drilling or slitting of the topmost layers using an ultrafast laser. This layer-by-layer additive/subtractivetechnique can be used to generate very narrow holes or slits (grooves) of unlimited aspect ratio. We demonstratethe potential of the technique by fabricating micro holes with a diameter < 50 μm and grooves with a width < 50μm, both with aspect ratios ≥ 150.
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