%0 Conference Paper %1 conf/nems/ZhuWXWPWZ0YCMJ13 %A Zhu, Zhiyuan %A Wang, Shaonan %A Xu, Yichao %A Wang, Guanjiang %A Pi, Yudan %A Wang, Peiquan %A Zhu, Yunhui %A Sun, Xin %A Yu, Min %A Chen, Jing %A Miao, Min %A Jin, Yufeng %B NEMS %D 2013 %I IEEE %K dblp %P 155-158 %T Investigations of silicon wafer bonding using thin Al and Sn films for heterogeneous integration. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhuWXWPWZ0YCMJ13

@inproceedings{conf/nems/ZhuWXWPWZ0YCMJ13, added-at = {2016-05-24T00:00:00.000+0200}, author = {Zhu, Zhiyuan and Wang, Shaonan and Xu, Yichao and Wang, Guanjiang and Pi, Yudan and Wang, Peiquan and Zhu, Yunhui and Sun, Xin and Yu, Min and Chen, Jing and Miao, Min and Jin, Yufeng}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2f2eb023574433928ab93fbf8521c0d71/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {http://dx.doi.org/10.1109/NEMS.2013.6559703}, interhash = {3d5e0bbc24015e7e8a6df1ec022f8ab5}, intrahash = {f2eb023574433928ab93fbf8521c0d71}, keywords = {dblp}, pages = {155-158}, publisher = {IEEE}, timestamp = {2016-05-25T09:32:21.000+0200}, title = {Investigations of silicon wafer bonding using thin Al and Sn films for heterogeneous integration.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhuWXWPWZ0YCMJ13}, year = 2013 }