%0 Conference Paper %1 pham2003metal %A Pham, Nga Phuong %A Boellaard, E. %A Wien, Wim A. H. %A van Den Brekel, Lucas D. M. %A Burghartz, Joachim N. %A Sarro, Pasqualina M. %B Eurosensors XVII : September 21 - 24, 2003, Guimarães, Portugal : book of abstracts : the 17th European Conference on Solid State Transducers %D 2003 %K INES firstnamemissing pagesmissing %T Metal Patterning on High Topography Surface For 3-D RF Devices Fabrication %@ 972-98603-1-9

@inproceedings{pham2003metal, added-at = {2019-03-26T18:43:37.000+0100}, author = {Pham, Nga Phuong and Boellaard, E. and Wien, Wim A. H. and van Den Brekel, Lucas D. M. and Burghartz, Joachim N. and Sarro, Pasqualina M.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2fba368079208aaea2470d97b1fe7e444/kevin.konnerth}, booktitle = {Eurosensors XVII : September 21 - 24, 2003, Guimarães, Portugal : book of abstracts : the 17th European Conference on Solid State Transducers}, eventdate = {2003-09-21/2003-09-24}, eventtitle = {17th European Conference on Solid State Transducers}, interhash = {aa8ae264b0ec6a4192d4fff5d6ad73c8}, intrahash = {fba368079208aaea2470d97b1fe7e444}, isbn = {972-98603-1-9}, keywords = {INES firstnamemissing pagesmissing}, timestamp = {2019-04-03T14:34:25.000+0200}, title = {Metal Patterning on High Topography Surface For 3-D RF Devices Fabrication}, venue = {Guimarães, Portugal}, year = 2003 }