For the first time we present a normally-closed electrostatic driven 3-way microvalve which is able to meet requirements of industrial applications like small form factor, high flow rate, low weight, low power consumption and a short response time. The microvalve consists of a 3 layer silicon chip stack mounted on a ceramics substrate, covered by a plastic cap. A driver electronics which converts TTL level to the actuation voltage of 200 V is put on top of the valve. The valve operates in a pressure range of up to 10 bar and has a flow rate of approx. 500 ml/min. Due to the electrostatic actuation principle the power consumption is below 5 mW and the response time is below 1 ms
%0 Conference Paper
%1 messner2003electrostatic
%A Messner, Stephan
%A Schaible, Jochen
%A Vollmer, J.
%A Sandmaier, Hermann
%A Zengerle, Roland
%B Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems
%C Piscataway, NJ
%D 2003
%I IEEE Operations Center
%K fis liste ubs_30119
%P 88-91
%R 10.1109/MEMSYS.2003.1189694
%T Electrostatic driven 3-way silicon microvalve for pneumatic applications
%X For the first time we present a normally-closed electrostatic driven 3-way microvalve which is able to meet requirements of industrial applications like small form factor, high flow rate, low weight, low power consumption and a short response time. The microvalve consists of a 3 layer silicon chip stack mounted on a ceramics substrate, covered by a plastic cap. A driver electronics which converts TTL level to the actuation voltage of 200 V is put on top of the valve. The valve operates in a pressure range of up to 10 bar and has a flow rate of approx. 500 ml/min. Due to the electrostatic actuation principle the power consumption is below 5 mW and the response time is below 1 ms
%@ 0-7803-7744-3
@inproceedings{messner2003electrostatic,
abstract = {For the first time we present a normally-closed electrostatic driven 3-way microvalve which is able to meet requirements of industrial applications like small form factor, high flow rate, low weight, low power consumption and a short response time. The microvalve consists of a 3 layer silicon chip stack mounted on a ceramics substrate, covered by a plastic cap. A driver electronics which converts TTL level to the actuation voltage of 200 V is put on top of the valve. The valve operates in a pressure range of up to 10 bar and has a flow rate of approx. 500 ml/min. Due to the electrostatic actuation principle the power consumption is below 5 mW and the response time is below 1 ms},
added-at = {2023-08-21T15:14:23.000+0200},
address = {Piscataway, NJ},
author = {Messner, Stephan and Schaible, Jochen and Vollmer, J. and Sandmaier, Hermann and Zengerle, Roland},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d8e48e2b364028be5bdf21ed6ca181f9/unibiblio-4},
booktitle = {Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems},
doi = {10.1109/MEMSYS.2003.1189694},
eventdate = {2003-01-19/2003-01-23},
eventtitle = {MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems},
interhash = {6e7e1440bd6bf210e2037a4e91e54b3f},
intrahash = {d8e48e2b364028be5bdf21ed6ca181f9},
isbn = {0-7803-7744-3},
keywords = {fis liste ubs_30119},
language = {eng},
pages = {88-91},
publisher = {IEEE Operations Center},
timestamp = {2023-09-01T10:39:54.000+0200},
title = {Electrostatic driven 3-way silicon microvalve for pneumatic applications},
venue = {Kyoto, Japan},
year = 2003
}