%0 Thesis %1 prause2023development %A Prause, Korbinian %B Berichte aus dem Institut für Technische Optik %C Stuttgart %D 2023 %I Institut für Technische Optik, Universität Stuttgart %K diss phf07 ubs_10007 ubs_20011 ubs_30114 unibibliografie %N 122 %T Development of a highly-miniaturized single-shot point distance sensor and a spectrometer free areal optical confocal metrology system %@ 978-3-948570-21-7

@phdthesis{prause2023development, added-at = {2023-10-18T18:01:52.000+0200}, address = {Stuttgart}, author = {Prause, Korbinian}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2cf62c669d49101f980df68b1bde52256/unibiblio-3}, eventdate = {2023-07-20}, interhash = {f64af831842e43f3c449acba827f7ea2}, intrahash = {cf62c669d49101f980df68b1bde52256}, isbn = {978-3-948570-21-7}, keywords = {diss phf07 ubs_10007 ubs_20011 ubs_30114 unibibliografie}, language = {eng}, number = 122, publisher = {Institut für Technische Optik, Universität Stuttgart}, school = {Universität Stuttgart}, series = {Berichte aus dem Institut für Technische Optik}, supervisor = {Herkommer, Alois}, supervisorgnd = {1079618449}, timestamp = {2023-10-18T18:01:52.000+0200}, title = {Development of a highly-miniaturized single-shot point distance sensor and a spectrometer free areal optical confocal metrology system}, type = {Dissertation}, year = 2023 }