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Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid-infrared by femtosecond direct laser writing and interference lithography

, , , , , , , , , , , und . Optical Materials Express, 5 (11): 2625-2633 (November 2015)
DOI: 10.1364/OME.5.002625

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