We demonstrate the integration of a wet-chemically etched surface relief on a vertical-cavity surface-emitting laser (VCSEL) emitting in the red spectral range for higher-order mode suppression. With this relief, fundamental-mode emission is achieved over the entire power range from threshold beyond thermal rollover. For collimation of the emitted beam, we implement polymer microlenses fabricated on-chip by a thermal reflow technique. We reduce the angle of divergence for all injected currents to a maximum of 2$\circ$. By measuring high-resolution spectra, we show that Gaussian beam profiles correspond to pure fundamental-mode emission which is preserved after implementation of the polymer microlens onto the etched relief, proving the compatibility of the two processes.
Beschreibung
Surface relief VCSELs at 670 nm with integrated polymer microlens for highly collimated fundamental-mode emission
%0 Journal Article
%1 Engel:24
%A Engel, Lena
%A Khamseh, Farnaz
%A Zimmer, Michael
%A Jetter, Michael
%A Michler, Peter
%D 2024
%I Optica Publishing Group
%J Opt. Lett.
%K ihfg
%N 11
%P 2898--2901
%R 10.1364/OL.524493
%T Surface relief VCSELs at 670 nm with integrated polymer microlens for highly collimated fundamental-mode emission
%U https://opg.optica.org/ol/abstract.cfm?URI=ol-49-11-2898
%V 49
%X We demonstrate the integration of a wet-chemically etched surface relief on a vertical-cavity surface-emitting laser (VCSEL) emitting in the red spectral range for higher-order mode suppression. With this relief, fundamental-mode emission is achieved over the entire power range from threshold beyond thermal rollover. For collimation of the emitted beam, we implement polymer microlenses fabricated on-chip by a thermal reflow technique. We reduce the angle of divergence for all injected currents to a maximum of 2$\circ$. By measuring high-resolution spectra, we show that Gaussian beam profiles correspond to pure fundamental-mode emission which is preserved after implementation of the polymer microlens onto the etched relief, proving the compatibility of the two processes.
@article{Engel:24,
abstract = {We demonstrate the integration of a wet-chemically etched surface relief on a vertical-cavity surface-emitting laser (VCSEL) emitting in the red spectral range for higher-order mode suppression. With this relief, fundamental-mode emission is achieved over the entire power range from threshold beyond thermal rollover. For collimation of the emitted beam, we implement polymer microlenses fabricated on-chip by a thermal reflow technique. We reduce the angle of divergence for all injected currents to a maximum of 2$\circ$. By measuring high-resolution spectra, we show that Gaussian beam profiles correspond to pure fundamental-mode emission which is preserved after implementation of the polymer microlens onto the etched relief, proving the compatibility of the two processes.},
added-at = {2024-07-01T11:02:02.000+0200},
author = {Engel, Lena and Khamseh, Farnaz and Zimmer, Michael and Jetter, Michael and Michler, Peter},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2ab793f52bad6a56a6a10c9b3a49ef04a/ihfgpuma},
description = {Surface relief VCSELs at 670 nm with integrated polymer microlens for highly collimated fundamental-mode emission},
doi = {10.1364/OL.524493},
interhash = {7c543168800e6b17df6218b74774b8b4},
intrahash = {ab793f52bad6a56a6a10c9b3a49ef04a},
journal = {Opt. Lett.},
keywords = {ihfg},
month = jun,
number = 11,
pages = {2898--2901},
publisher = {Optica Publishing Group},
timestamp = {2024-07-01T11:02:02.000+0200},
title = {Surface relief VCSELs at 670 nm with integrated polymer microlens for highly collimated fundamental-mode emission},
url = {https://opg.optica.org/ol/abstract.cfm?URI=ol-49-11-2898},
volume = 49,
year = 2024
}
