Selfassembly of Micro Components with Microfluidics
N. Boufercha, J. Sägebarth, M. Burgard, N. Othman, W. Schäfer, und H. Sandmaier. Proceedings / The International Workshop on Micro- and Nano Production Technologies and Systems, Seite 44-52. Moscow, Russian Academy of Sciences, Inst. for Problems in Mechanics, (2007)
Zusammenfassung
Latest roadmaps indicate that the size of assembled silicon chips will dramatically be reduced. The size of these chips will be less than 500qm x 500 qm and will have a thickness lower than 50 to 70 qm. This reduction allows the use of flexible substrates and reduces the cost of the component as well. In parallel the costs of the manufacturing process should also be reduced
%0 Conference Paper
%1 boufercha2007selfassembly
%A Boufercha, Nourdin
%A Sägebarth, Joachim
%A Burgard, Matthias
%A Othman, Nabih
%A Schäfer, Wolfgang
%A Sandmaier, Hermann
%B Proceedings / The International Workshop on Micro- and Nano Production Technologies and Systems
%C Moscow
%D 2007
%E Gradeckij, Valerij G.
%I Russian Academy of Sciences, Inst. for Problems in Mechanics
%K liste ubs_30119 unibibliografie
%P 44-52
%T Selfassembly of Micro Components with Microfluidics
%X Latest roadmaps indicate that the size of assembled silicon chips will dramatically be reduced. The size of these chips will be less than 500qm x 500 qm and will have a thickness lower than 50 to 70 qm. This reduction allows the use of flexible substrates and reduces the cost of the component as well. In parallel the costs of the manufacturing process should also be reduced
@inproceedings{boufercha2007selfassembly,
abstract = {Latest roadmaps indicate that the size of assembled silicon chips will dramatically be reduced. The size of these chips will be less than 500qm x 500 qm and will have a thickness lower than 50 to 70 qm. This reduction allows the use of flexible substrates and reduces the cost of the component as well. In parallel the costs of the manufacturing process should also be reduced},
added-at = {2020-03-27T16:31:21.000+0100},
address = {Moscow},
author = {Boufercha, Nourdin and Sägebarth, Joachim and Burgard, Matthias and Othman, Nabih and Schäfer, Wolfgang and Sandmaier, Hermann},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2476ddd09f2c6ddf2f2433fd145ba525a/unibiblio},
booktitle = {Proceedings / The International Workshop on Micro- and Nano Production Technologies and Systems},
editor = {Gradeckij, Valerij G.},
eventdate = {2007-10-17/2007-10-18},
eventtitle = {The International Workshop on Micro- and Nano Production Technologies and Systems 2007},
interhash = {4bdff7d58e2963369723e8d2a60aae26},
intrahash = {476ddd09f2c6ddf2f2433fd145ba525a},
keywords = {liste ubs_30119 unibibliografie},
language = {eng},
pages = {44-52},
publisher = {Russian Academy of Sciences, Inst. for Problems in Mechanics},
timestamp = {2020-03-27T15:31:21.000+0100},
title = {Selfassembly of Micro Components with Microfluidics},
venue = {Moscow, Russia},
year = 2007
}