%0 Journal Article %1 journals/tvlsi/MirsaeediTA14 %A Mirsaeedi, Minoo %A Torres, Andres J. %A Anis, Mohab H. %D 2014 %J IEEE Trans. VLSI Syst. %K dblp %N 5 %P 1170-1174 %T Litho-Friendly Decomposition Method for Self-Aligned Triple Patterning. %U http://dblp.uni-trier.de/db/journals/tvlsi/tvlsi22.html#MirsaeediTA14 %V 22

@article{journals/tvlsi/MirsaeediTA14, added-at = {2014-04-28T00:00:00.000+0200}, author = {Mirsaeedi, Minoo and Torres, Andres J. and Anis, Mohab H.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/208d086fbdbbb1e5e73f4508991998e2a/dblp}, ee = {http://dx.doi.org/10.1109/TVLSI.2013.2265309}, interhash = {bb147bd9b166db8b1dcf874ea9fcaa3b}, intrahash = {08d086fbdbbb1e5e73f4508991998e2a}, journal = {IEEE Trans. VLSI Syst.}, keywords = {dblp}, number = 5, pages = {1170-1174}, timestamp = {2016-02-02T02:13:34.000+0100}, title = {Litho-Friendly Decomposition Method for Self-Aligned Triple Patterning.}, url = {http://dblp.uni-trier.de/db/journals/tvlsi/tvlsi22.html#MirsaeediTA14}, volume = 22, year = 2014 }