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%0 Conference Paper
%1 oehme2018sigesn
%A Oehme, Michael
%A Schwarz, D.
%A Schulze, Jörg
%A Clausen, Caterina J.
%A Fischer, Inga A.
%B Silicon Photonics : From Fundamental Research to Manufacturing
%D 2018
%E Baets, Roel G.
%E O'Brian, Peter
%E Vivien, Laurent
%I SPIE
%K
%N 10686
%R 10.1117/12.2318011
%T SiGeSn material for integrated optical devices
%@ 978-1-5106-1898-5 and 978-1-5106-1899-2
@inproceedings{oehme2018sigesn,
added-at = {2023-08-31T14:58:39.000+0200},
author = {Oehme, Michael and Schwarz, D. and Schulze, Jörg and Clausen, Caterina J. and Fischer, Inga A.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/277acc236918e20b9a324fcd60d39e818/puma-wartung},
booktitle = {Silicon Photonics : From Fundamental Research to Manufacturing},
doi = {10.1117/12.2318011},
editor = {Baets, Roel G. and O'Brian, Peter and Vivien, Laurent},
eventdate = {2018-04-22/2018-04-26},
eventtitle = {SPIE Photonics Europe, 2018},
interhash = {1b7f6f0fa2d6e0b16e07205d01eb8dda},
intrahash = {77acc236918e20b9a324fcd60d39e818},
isbn = {{978-1-5106-1898-5} and {978-1-5106-1899-2}},
keywords = {},
language = {eng},
number = 10686,
publisher = {SPIE},
series = {Proceedings of SPIE},
timestamp = {2023-08-31T12:58:39.000+0200},
title = {SiGeSn material for integrated optical devices},
venue = {Strasbourg},
year = 2018
}