%0 Conference Paper %1 Zimmermann2007b %A Zimmermann, J. %A Sawodny, O. %B Ilmenauer Wissenschafliches Kolloquium (IWK) %D 2007 %K Friction ISYS Measurement Nano %T Modelling and Control of a X-Y-Fine Positioning Table

@inproceedings{Zimmermann2007b, added-at = {2017-11-28T18:08:48.000+0100}, author = {Zimmermann, J. and Sawodny, O.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a74b426ca6ea4beb45c95c9ec6e1a806/isyspub}, booktitle = {Ilmenauer Wissenschafliches Kolloquium (IWK)}, interhash = {1a64c030bba3626f4d7ef8a556cb221c}, intrahash = {a74b426ca6ea4beb45c95c9ec6e1a806}, isys_authors = {jzimmermann}, isys_group = {MFU, OptoMech}, keywords = {Friction ISYS Measurement Nano}, timestamp = {2017-11-28T17:08:48.000+0100}, title = {Modelling and Control of a X-Y-Fine Positioning Table}, year = 2007 }