%0 Journal Article %1 journals/mr/AgeevKBSK15 %A Ageev, O. A. %A Kolomiytsev, Alexey S. %A Bykov, A. V. %A Smirnov, V. A. %A Kots, I. N. %D 2015 %J Microelectronics Reliability %K dblp %N 9-10 %P 2131-2134 %T Fabrication of advanced probes for atomic force microscopy using focused ion beam. %U http://dblp.uni-trier.de/db/journals/mr/mr55.html#AgeevKBSK15 %V 55

@article{journals/mr/AgeevKBSK15, added-at = {2018-11-30T00:00:00.000+0100}, author = {Ageev, O. A. and Kolomiytsev, Alexey S. and Bykov, A. V. and Smirnov, V. A. and Kots, I. N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c88c029c2daaaeacb60d335a9b29ba92/dblp}, ee = {https://doi.org/10.1016/j.microrel.2015.06.079}, interhash = {977e85084a9c3df2190f3351eac1ee1a}, intrahash = {c88c029c2daaaeacb60d335a9b29ba92}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {9-10}, pages = {2131-2134}, timestamp = {2019-09-27T10:58:24.000+0200}, title = {Fabrication of advanced probes for atomic force microscopy using focused ion beam.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr55.html#AgeevKBSK15}, volume = 55, year = 2015 }