Abstract
Micro manufacturing is dealing with the fabrication of structures in the order of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales: below 100 nm. A strict borderline between micro and nano manufacturing can hardly be drawn, such that both domains are treated as complementary and mutually beneficial within a closely interconnected scientific community. Both micro and nano manufacturing can be considered as important enablers for high-end products. Especially, such products are enabled by micro and nano features and structures to incorporate special optical, electronic, mechanical, fluidic or biological functions into existing and new emerging products, and thus lead to unique selling points. Application fields include, but are not restricted to, precision instrumentation, sensors, metrology, energy harvesting, mechatronic systems, transport, medical technologies and life sciences. This Special Issue is dedicated to recent advances in research and development within the field of micro and nano manufacturing. The included papers report recent findings and advances in manufacturing technologies for producing products with micro and nano scale features and structures as well as applications underpinned by the advances in these technologies. In particular, the Special Issue covers the following topics:
•Micro fabrication technologies, process chains and process characterization;
•Novel product designs, micro-assembly technologies and micro-handling;
•Surface engineering and interface nanotechnology;
•Process modeling and simulation;
•Processing and characterization of nanomaterials;
•Micro and nano additive manufacturing technologies;
•Micro and desktop factory concepts, systems, components and modules;
•On-line monitoring and inspection systems/methods;
•Applications of micro and nano technologies.
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