%0 Journal Article
%1 burghartz1997spiral
%A Burghartz, Joachim N.
%A Edelstein, Daniel C.
%A Jenkins, Keith A.
%A Kwark, Young H.
%C Piscataway, New Jersey
%D 1997
%I IEEE
%J IEEE Transactions on Microwave Theory and Techniques
%K INES
%N 10
%P 1961-1968
%R 10.1109/22.641804
%T Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates
%V 45
@article{burghartz1997spiral,
added-at = {2019-04-09T12:05:24.000+0200},
address = {Piscataway, New Jersey},
author = {Burghartz, Joachim N. and Edelstein, Daniel C. and Jenkins, Keith A. and Kwark, Young H.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/25f91d1257f4d19ccc3d0b10273672f4f/kevin.konnerth},
doi = {10.1109/22.641804},
interhash = {833cb1ddb5e5213d677608a25450ecde},
intrahash = {5f91d1257f4d19ccc3d0b10273672f4f},
issn = {{0018-9480} and {1557-9670}},
journal = {IEEE Transactions on Microwave Theory and Techniques},
keywords = {INES},
month = oct,
number = 10,
pages = {1961-1968},
publisher = {IEEE},
timestamp = {2019-04-09T10:05:24.000+0200},
title = {Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates},
volume = 45,
year = 1997
}