%0 Journal Article %1 burghartz1997spiral %A Burghartz, Joachim N. %A Edelstein, Daniel C. %A Jenkins, Keith A. %A Kwark, Young H. %C Piscataway, New Jersey %D 1997 %I IEEE %J IEEE Transactions on Microwave Theory and Techniques %K INES %N 10 %P 1961-1968 %R 10.1109/22.641804 %T Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates %V 45

@article{burghartz1997spiral, added-at = {2019-04-09T12:05:24.000+0200}, address = {Piscataway, New Jersey}, author = {Burghartz, Joachim N. and Edelstein, Daniel C. and Jenkins, Keith A. and Kwark, Young H.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/25f91d1257f4d19ccc3d0b10273672f4f/kevin.konnerth}, doi = {10.1109/22.641804}, interhash = {833cb1ddb5e5213d677608a25450ecde}, intrahash = {5f91d1257f4d19ccc3d0b10273672f4f}, issn = {{0018-9480} and {1557-9670}}, journal = {IEEE Transactions on Microwave Theory and Techniques}, keywords = {INES}, month = oct, number = 10, pages = {1961-1968}, publisher = {IEEE}, timestamp = {2019-04-09T10:05:24.000+0200}, title = {Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates}, volume = 45, year = 1997 }